Self-bias voltage formation and charged particle dynamics in multi-frequency capacitively coupled plasmas

In this work, we analyze the creation of discharge asymmetry and concomitant formation DC self-bias voltage in capacitively coupled radio frequency plasmas driven by multi-frequency waveforms as a function electrode surface characteristics. For latter, consider vary coefficients that characterize elastic reflection electrons from surfaces ion-induced secondary electron yield. Our investigations are based on particle-in-cell/Monte Carlo collision simulations plasma model aids understanding computational results. Electron electrodes is found to slightly affect presence excitation, whereas cause distinct changes phase angle between harmonics driving waveform number these harmonics.